Growth-Induced Structural Defects in SiC PVT Boules

Growth-Induced Structural Defects in SiC PVT Boules

著者名:: Skowronski, M.
掲載資料名:: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001
シリーズ名:: Materials science forum
シリーズ巻号:: 389-393
発行年:: 2002
開始ページ:: 385
終了ページ:: 390
総ページ数:: 6
出版情報:: Zuerich, Switzerland: Trans Tech Publications
ISSN:: 02555476
ISBN:: 9780878498949 [087849894X]
言語:: 英語
請求記号:: M23650
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00013330
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2001
会議開催地:	Tsukuba, Japan
会議開催年:	2001.10.28-2001.11.02

類似資料:

1 国際会議録 Growth-Induced Structural Defects in SiC PVT Boules Skowronski, M. Trans Tech Publications	7 国際会議録 Numerical Simulation of SiC Boule Growth by Sublimation Madar, R., Pons, M., Dedulle, J. -M., Blanquet, E., Pisch, A., Grosse, P., Faure, C., Anikin, M., Bernard, C. Trans Tech Publications
2 国際会議録 Origin of Threading Dislocation Arrays in SiC Boules Grown by PVT Ha, S., Nuhfer, N. T., Graef, M. De, Rohrer, G. S., Skowronski, M. Trans Tech Publications	8 国際会議録 SiC Seeded Boule Growth Tsvetkov,V., Glass,R.C., Henshall,D., Asbury,D., ,C.H.Carter,Jr. Trans Tech Publications
3 国際会議録 Plastic Deformation and Residual Stresses in SiC Boules Grown by PVT Ha, S., Rohrer, G. S., Skowronski, M., Heydemann, V. D., Snyder, D. W. Trans Tech Publications	9 国際会議録 Growth of SiC Boules with Low Boron Concentration Fanton, M.A., Cavalero, R.L., Ray, R.G., Weiland, B.E., Everson, W., Snyder, D.W., Gamble, R.D., Oslosky, E. Trans Tech Publications
4 国際会議録 Coupled Thermodynamic - Mass Transfer Modeling of the SiC Boule Growth by the PVT Method Pisch, A., Blanquet, E., Pons, M., Bernard, C., Dedulle, J.-M., Madar, R. Trans Tech Publications	10 国際会議録 Analysis of Sub-Surface Damage-Induced Threading Dislocations in Physical Vapor Transport Growth of 6H-SiC Liu, J.Q., Sanchez, E.K., Skowronski, M. Trans Tech Publications
5 国際会議録 The Structural Evolution of Lely Seeds During the Initial Stages of SiC Sublimation Growth Heydemann, V. D., Sanchez, E. K., Rohrer, G. S., Skowronski, M. MRS - Materials Research Society	11 国際会議録 Analysis of Sub-Surface Damage-Induced Threading Dislocations in Physical Vapor Transport Growth of 6H-SiC Liu, J.Q., Sanchez, E.K., Skowronski, M. Trans Tech Publications
6 国際会議録 In Situ X-Ray Measurements of Defect Generation during PVT Growth of SiC K. Konias, R. Hock, M. Stockmeier, P.J. Wellmann, M. Miller, S. Ossege, A. Magerl Trans Tech Publications	12 国際会議録 Resistivity Distribution in Undoped 6H-SiC Boules and Wafers Li, Q., Polyakov, A.Y., Skowronski, M., Sanchez, E.K., Loboda, M.J., Fanton, M.A., Bogart, T., Gamble, D., Smirnov, … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12