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Resistivity Mapping of Semi-Insulating 6H-SiC Wafers

著者名:
Roth, M.D.
Heydemann, V.D.
Mitchel, W.C.
Yushin, N.K.
Sharma, M.
Wang, S.
Balkas, C.M.
さらに 2 件
掲載資料名:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001
シリーズ名:
Materials science forum
シリーズ巻号:
389-393
発行年:
2002
開始ページ:
135
終了ページ:
138
総ページ数:
4
出版情報:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498949 [087849894X]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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