Ion Implantation Induced Defects in 6H-SiC and their Annealing Behaviour
- 著者名:
- 掲載資料名:
- Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 363-365
- 発行年:
- 2001
- 開始ページ:
- 442
- 終了ページ:
- 444
- 総ページ数:
- 3
- 出版情報:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878498758 [0878498753]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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