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Differentiation between C and Si Related Damage Centres in 4H- and 6H-SiC by the Use of 90-300 kV Electron Irradiation Followed by Low Temperature Photoluminescence Microscopy

著者名:
Steeds, J.W.
Carosella, F.
Evans, A.G.
Ismail, M.M.
Danks, L. R.
Voegeli, W.
さらに 1 件
掲載資料名:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000
シリーズ名:
Materials science forum
シリーズ巻号:
353-356
発行年:
2001
開始ページ:
381
終了ページ:
384
総ページ数:
4
出版情報:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498734 [0878498737]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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