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Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering

著者名:
Lei, Y.M.
Yu, Y.H.
Cheng, L.L.
Lin, L.
Sundaraval, B.
Luo, E.Z.
Lin, S.
Ren, C.X.
Cheung, W.Y.
Wong, S.P.
Xu, J.B.
Zou, S.C.
Wilson, I.H.
さらに 8 件
掲載資料名:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000
シリーズ名:
Materials science forum
シリーズ巻号:
353-356
発行年:
2001
開始ページ:
191
終了ページ:
194
総ページ数:
4
出版情報:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498734 [0878498737]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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