Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor

Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor

著者名:

Vorob'ev, A.N.

掲載資料名:

Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000

シリーズ名:

Materials science forum

シリーズ巻号:

353-356

発行年:

2001

開始ページ:

107

終了ページ:

110

総ページ数:

4

出版情報:

Uetikon-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498734 [0878498737]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013315
シリーズID:	PA00000012
会議名:	ECSCRM : European Conference on Silicon Carbide and Related Materials
回次:	2000 : 3rd
会議開催地:	Benediktinerkloster Banz, Germany
会議開催年:	2000.09.00

類似資料:

1 国際会議録 Computational experiment of CVD of SiC: Growth rate, C/Si ratio, parasitic phase formation Vorob'ev, Andrei N., Komissarov, Alexandre E., Bogdanov, Maxim V., Karpov, Sergey Yu., Bord, Olga V., Zhmakin, Alexandre … MRS-Materials Research Society	7 国際会議録 Mass Transport and Powder Source Evolution in Sublimation Growth of SiC Bulk Crystals Karpov, D.S., Bord, O.V., Karpov, S.Yu., Zhmakin, A.I., Ramm, M.S., Makarov, Yu.N. Trans Tech Publications
2 国際会議録 Virtual Reactor: A New Tool for SiC Bulk Crystal Growth Study and Optimization Bogdanov, M.V., Bord, O.V., Galyukov, A.O., Karpov, S.Yu., Kulik, A.V., Kochuguev, S.K., Komissarov, A.E., Ofengeim, … Trans Tech Publications	8 国際会議録 Theoretical Analysis of the Mass Transport in the Powder Charge in Long-Term Bulk SiC Growth Kulik, A.V., Bogdanov, M.V., Karpov, S.Yu., Ramm, M.S., Makarov, Yu.N. Trans Tech Publications
3 国際会議録 Effect of Gas Phase Nucleation on Silicon Carbide Chemical Vapor Deposition Vorobev, A.N., Komissarov, A.E., Bogdanov, M.V., Karpov, S.Yu., Lovisus, A.A., Makarov, Yu.N., Lowsy, S.A. Electrochemical Society	9 国際会議録 Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane Y.N. Makarov, R.A. Talalaev, A.N. Vorob'ev, M.S. Ramm, M.V. Bogdanov Trans Tech Publications
4 国際会議録 Modeling Analysis of SiC CVD in the Horizontal Hot Wall Reactors Semennikov, A.K., Talalaev, R.A., Vorob'ev, A.N., Makarov, Yu.N. Electrochemical Society	10 国際会議録 Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling Y. Shishkin, R.L. Myers-Ward, S.E. Saddow, A. Galyukov, A. Vorob'ev, D. Brovin, D. Bazarevskiy, R. Talalaev, Y.N. … Trans Tech Publications
5 国際会議録 Modeling Analysis of Gas-Phase Generated Silicon Clusters in a Rotating Disk CVD Reactor Vorob'ev, A., Makarov, N.Y., Karpov, S.U. Electrochemical Society	11 国際会議録 Inverse-Computation Design of a SiC Bulk Crystal Growth System Kulik, Alexey V., Demina, Sventlana E., Kochuguev, Sergey K., Ofengeim, Dmitry Kh., Karpov, Sergey Yu., Vorob'ev, Andrey … Materials Research Society
6 国際会議録 Modeling Analysis of SiC CVD in a Planetary Reactor Vorob'ev, A.N., Semennikov, A.K., Zhmakin, A.I., Makarov, Yu.N., Dauelsberg, M., Wischmeyer, F., Heuken, M., Juergensen, … Trans Tech Publications	12 国際会議録 Experimental and Theoretical Analysis of Heat and Mass Transport in the System for AlN Bulk Crystal Growth Bogdanov, M.V., Karpov, S.Yu., Kulik, A.V., Ramm, M.S., Makarov, Yu.N., Schlesser, R., Dalmau, R.F., Sitar, Z. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12