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Novel planar laser encoder system for two-dimensional positioning with ultrahigh head-to-scale alignment tolerance

著者名:
  • Wu, C.-C. ( Industrial Technology Research Institute (Taiwan) )
  • Chang, C.C. ( Industrial Technology Research Institute (Taiwan) )
  • Kao, C.-F. ( Industrial Technology Research Institute (Taiwan) )
  • Peng, G.-S. ( Industrial Technology Research Institute (Taiwan) )
掲載資料名:
Current developments in lens design and optical engineering IV : 3-4 August 2003, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5173
発行年:
2003
開始ページ:
55
終了ページ:
63
総ページ数:
9
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450463 [0819450464]
言語:
英語
請求記号:
P63600/5173
資料種別:
国際会議録

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