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Printability study for phase-shift masks at 193-nm lithography

著者名:
掲載資料名:
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5148
発行年:
2003
開始ページ:
79
終了ページ:
89
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450180 [0819450189]
言語:
英語
請求記号:
P63600/5148
資料種別:
国際会議録

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