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Interference microscope for sub-Angstrom surface roughness measurements

著者名:
掲載資料名:
Optical Measurement Systems for Industrial Inspection III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5144
発行年:
2003
開始ページ:
37
終了ページ:
45
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450142 [0819450146]
言語:
英語
請求記号:
P63600/5144
資料種別:
国際会議録

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