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Characterization of Advanced Semiconductor Materials by Thermal Desorption Mass Spectrometry with Atmospheric, Pressure Ionization

著者名:
Carbonell, L.
Vereecke, G.
Van Elshocht, S.
Caymax, M.
Van Hove, M.
Maex, K.
Mertens, P.
さらに 2 件
掲載資料名:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5133
発行年:
2003
開始ページ:
150
終了ページ:
159
総ページ数:
10
出版情報:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449993 [0819449997]
言語:
英語
請求記号:
P63600/5133
資料種別:
国際会議録

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