Advanced FIB mask repair technology for 100-nm/ArF lithography: II
- 著者名:
Hagiwara, R. ( Seiko Instruments, Inc. (Japan) ) Yasaka, A. ( Seiko Instruments, Inc. (Japan) ) Aita, K. ( Seiko Instruments, Inc. (Japan) ) Takaoka, O. ( Seiko Instruments, Inc. (Japan) ) Koyama, Y. ( Seiko Instruments, Inc. (Japan) ) Kozakai, T. ( Seiko Instruments, Inc. (Japan) ) Doi, T. ( Seiko Instruments, Inc. (Japan) ) Muramatsu, M. ( Seiko Instruments, Inc. (Japan) ) Suzuki, K. ( Seiko Instruments, Inc. (Japan) ) Sugiyama, Y. ( Seiko Instruments, Inc. (Japan) ) Matsuda, O. ( Seiko Instruments, Inc. (Japan) ) Okabe, M. ( Seiko Instruments, Inc. (Japan) ) Shinohara, S. ( Seiko Instruments, Inc. (Japan) ) Hasuda, M. ( Seiko Instruments, Inc. (Japan) ) Adachi, T. ( Seiko Instruments, Inc. (Japan) ) Morikawa, Y. ( Dai Nippon Printing Co., Ltd. (Japan) ) Nishiguchi, M. ( Dai Nippon Printing Co., Ltd. (Japan) ) Sato, Y. ( Dai Nippon Printing Co., Ltd. (Japan) ) Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) ) Ozawa, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Tanaka, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Yoshioka, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) - 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology X
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5130
- 発行年:
- 2003
- 開始ページ:
- 510
- 終了ページ:
- 519
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449962 [0819449962]
- 言語:
- 英語
- 請求記号:
- P63600/5130
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |