Electrical and optical properties of thick Mg2Si films on Si(111)

Electrical and optical properties of thick Mg2Si films on Si(111)

著者名:

Galkin, N.G. ( Institute for Automation and Control Processes (Russia) )
Vavanova, S.V. ( Institute for Automation and Control Processes (Russia) )
Maslov, A.M. ( Institute for Automation and Control Processes (Russia) )
Galkin, K.N. ( Institute for Automation and Control Processes (Russia) )

掲載資料名:

Fundamental problems of optoelectronics and microelectronics : 30 September-4 october, 2002, Vladivostok, Russia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5129

発行年:

2003

開始ページ:

313

終了ページ:

323

総ページ数:

11

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449894 [081944989X]

言語:

英語

請求記号:

P63600/5129

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013117
シリーズID:	PA00000029
会議名:	Fundamental problems of optoelectronics and microelectronics
回次:	2002
会議開催地:	Vladivostok, Russia
会議開催年:	2002.09.30-2002.10.04

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