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Stress-induced leakage currents of silicon oxides in flash EEPROM transistor

著者名:
Kang, C.S. ( Yuhan College (South Korea) )  
掲載資料名:
Nanotechnology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5118
発行年:
2003
開始ページ:
620
終了ページ:
627
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449788 [0819449784]
言語:
英語
請求記号:
P63600/5118
資料種別:
国際会議録

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