Scaling down photonic waveguide devices on the SOI platform
- 著者名:
- Cheben, P. ( National Research Council Canada (Canada) )
- Xu, D.-X. ( National Research Council Canada (Canada) )
- Janz, S. ( National Research Council Canada (Canada) )
- Delage, A. ( National Research Council Canada (Canada) )
- 掲載資料名:
- VLSI Circuits and Systems
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5117
- 発行年:
- 2003
- 開始ページ:
- 147
- 終了ページ:
- 156
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449771 [0819449776]
- 言語:
- 英語
- 請求記号:
- P63600/5117
- 資料種別:
- 国際会議録
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3
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A 100-channel near-infrared SOI waveguide microspectrometer: design and fabrication challenges
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SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
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SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |