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High-performance polysilicon air-gap thin film transistor on low-temperature substrates

著者名:
Mahfoz-Kotb, H. ( Univ. de Rennes I (France) )
Salaun, A.-C. ( Univ. de Rennes I (France) )
Mohammed-Brahim, T. ( Univ. de Rennes I (France) )
Coulon, N. ( Univ. de Rennes I (France) )
Bonnaud, O. ( Univ. de Rennes I (France) )
Mevellec, J.-Y. ( Institut des Materiaux de Nantes (France) )
さらに 1 件
掲載資料名:
Smart Sensors, Actuators, and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5116
発行年:
2003
巻:
1
パート:
Session 3
開始ページ:
168
終了ページ:
175
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
言語:
英語
請求記号:
P63600/5116
資料種別:
国際会議録

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