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Optical interferometric measurements of the static/dynamic response characteristics of MEMS ultrasonic transducers

著者名:
掲載資料名:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5045
発行年:
2003
開始ページ:
172
終了ページ:
182
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448507 [0819448508]
言語:
英語
請求記号:
P63600/5045
資料種別:
国際会議録

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