Recursive least squares estimation and its application to shallow trench isolation
- 著者名:
- Wang, J. ( Advanced Micro Devices, Inc. (USA) )
- Qin, S.J. ( Univ. of Texas at Austin (USA) )
- Bode, C.A. ( Advanced Micro Devices, Inc. (USA) )
- Purdy, M.A. ( Advanced Micro Devices, Inc. (USA) )
- 掲載資料名:
- Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5044
- 発行年:
- 2003
- 開始ページ:
- 109
- 終了ページ:
- 120
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448491 [0819448494]
- 言語:
- 英語
- 請求記号:
- P63600/5044
- 資料種別:
- 国際会議録
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9
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Study of integration issues in shallow trench isolation for deep submicron CMOS technologies
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