Recursive least squares estimation and its application to shallow trench isolation

Recursive least squares estimation and its application to shallow trench isolation

著者名:

Wang, J. ( Advanced Micro Devices, Inc. (USA) )
Qin, S.J. ( Univ. of Texas at Austin (USA) )
Bode, C.A. ( Advanced Micro Devices, Inc. (USA) )
Purdy, M.A. ( Advanced Micro Devices, Inc. (USA) )

掲載資料名:

Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5044

発行年:

2003

開始ページ:

109

終了ページ:

120

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448491 [0819448494]

言語:

英語

請求記号:

P63600/5044

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013035
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Advanced process control and automation
回次:	2003
会議開催地:	Santa Clara, CA, USA
会議開催年:	2003.03.27

類似資料:

1 国際会議録 Scatterometry for shallow trench isolation (STI) process metrology Raymond,C.J., Littau,M.E., Markle,R.J., Purdy,M.A. SPIE-The International Society for Optical Engineering	7 国際会議録 Improved Shallow Trench Isolation Process for Sub-Quarter-Micron CMOS Technologies Sallagoity, P., Gaillard, F., Rivoire, M., Paoli, M., Brouquet, P., Haond, M., McClathie, S., Beekmann, K., Kiermasz, … Electrochemical Society
2 国際会議録 Analysis of the recursive least squares lattice algorithm Bunch R. J., LeBorne C. R. Kluwer Academic Publishers	8 国際会議録 Optimization of scatterometry parameters for shallow trench isolation (STI) monitor Leray, P.J., Cheng, S., Kremer, S., Ercken, M., Pollentier, I. SPIE - The International Society of Optical Engineering
3 国際会議録 Parallel Recursive Least Squares on a Hypercube Multiprocessor Hankel S. Charles, Plemmons J. Robert Springer-Verlag	9 国際会議録 Study of integration issues in shallow trench isolation for deep submicron CMOS technologies Chatterjee,A., Mason,M.E., Joyner,K., Rogers,D., Mercer,D., Kuehne,J., Esquivel,A.L., Mei,P., Murtaza,S.S., Taylor,K.J., … SPIE-The International Society for Optical Engineering
4 国際会議録 Simplified CMP Planarization Process Module for Shallow Trench Isolation Applications Kapkin, K., Alogaard, M., Curds, T., deRuiren, J. Electrochemical Society	10 国際会議録 Scatterometer-based scanner fingerprinting technique(ScatterLith) and its applications in image field and ACLV analysis Wang, C., Zhang, G., DeMoor, S.J., Boehm, M.A., Littau, M.E., Raymond, C.J. SPIE-The International Society for Optical Engineering
5 国際会議録 A New Dummy-free Shallow Trench Isolation Concept for Mixed-Signal Applications Badenes, G., Rooyackers, R., Augendre, E., Vandamme, E., Perello, C., Heylen, N., Grillaert, J., Deferm, L. Electrochemical Society	11 テクニカルペーパー Robust Recursive Least Squares Algorithm for Automotive Suspension Identification. Ludovico, C.S., Bermudez, J.C.M. Society of Automotive Engineers
6 国際会議録 A Recursive Gradient Method of Least Square Support Vector Machine and its Application Luo, Xiang Yong, Lv, Wei Min, Song, Zhao Qing, Jiang, Shi Wei Trans Tech Publications	12 国際会議録 Recursive least squares approach to calculate motion parameters for a moving camera Chang, S. H., Fuller, J., Farsaie, A., Elkins, L. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12