Toward performance-driven reduction of the cost of RET-based lithography control (Invited Paper)

Toward performance-driven reduction of the cost of RET-based lithography control (Invited Paper)

著者名:

Gupta, P. ( Univ. of California/San Diego (USA) )
Kahng, A.B. ( Univ. of California/San Diego (USA) )
Sylvester, D. ( Univ. of Michigan (USA) )
Yang, J. ( Univ. of Michigan (USA) )

掲載資料名:

Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5043

発行年:

2003

開始ページ:

123

終了ページ:

133

総ページ数:

11

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448484 [0819448486]

言語:

英語

請求記号:

P63600/5043

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013034
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Cost and performance in integrated circuit creation
回次:	2003
会議開催地:	Santa Clara, CA, USA
会議開催年:	2003.02.27-2003.02.28

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