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Performance-impact limited-area fill synthesis

著者名:
  • Chen, Y. ( Univ. of California/Los Angeles (USA) )
  • Gupta, P. ( Univ. of California/San Diego (USA) )
  • Kahng, A.B. ( Univ. of California/San Diego (USA) )
掲載資料名:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5042
発行年:
2003
開始ページ:
75
終了ページ:
86
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448477 [0819448478]
言語:
英語
請求記号:
P63600/5042
資料種別:
国際会議録

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