Technology CAD for integrated circuit fabrication technology development and technology transfer
- 著者名:
- Saha, S. ( Silicon Storage Technology, Inc. (USA) )
- 掲載資料名:
- Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5042
- 発行年:
- 2003
- 開始ページ:
- 63
- 終了ページ:
- 74
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448477 [0819448478]
- 言語:
- 英語
- 請求記号:
- P63600/5042
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Sijthoff&Noordhoff International Publishes |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
4
国際会議録
Ion implanted integrated optics (I3O) technology for planar lightwave circuits (PLCs) fabrication
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |