Printing 95-nm DRAM full chip patterns in KrF lithography
- 著者名:
Kim, S.-K. ( Hynix Semiconductor, Inc. (South Korea) ) Kim, J.-S. ( Hynix Semiconductor, Inc. (South Korea) ) Yoo, T.-J. ( Hynix Semiconductor, Inc. (South Korea) ) Kong, K.-K. ( Hynix Semiconductor, Inc. (South Korea) ) Yun, H.-S. ( Hynix Semiconductor, Inc. (South Korea) ) Kim, Y.-D. ( Hynix Semiconductor, Inc. (South Korea) ) Kim, H.-R. ( Hynix Semiconductor, Inc. (South Korea) ) Kim, Y.-S. ( Hynix Semiconductor, Inc. (South Korea) ) Kim, H.S. ( Hynix Semiconductor, Inc. (South Korea) ) - 掲載資料名:
- Optical Microlithography XVI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5040
- 発行年:
- 2003
- 巻:
- Part Three
- 開始ページ:
- 1321
- 終了ページ:
- 1326
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- 言語:
- 英語
- 請求記号:
- P63600/5040
- 資料種別:
- 国際会議録
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