Challenge for effective OCV control in 90-nm logic gate using ArF lithography
- 著者名:
Kang, H.-J. ( Samsung Electroincs Co., Ltd. (South Korea) ) Lee, S.-W. ( Samsung Electronics Co., Ltd. (South Korea) ) Lee, D.-Y. ( Samsung Electronics Co., Ltd. (South Korea) ) Yeo, G.-S. ( Samsung Electronics Co., Ltd. (South Korea) ) Lee, J.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Cho, H.-K. ( Samsung Electronics Co., Ltd. (South Korea) ) Han, W.-S. ( Samsung Electronics Co., Ltd. (South Korea) ) Moon, J.-T. ( Samsung Electronics Co., Ltd. (South Korea) ) - 掲載資料名:
- Optical Microlithography XVI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5040
- 発行年:
- 2003
- 巻:
- Part Two
- 開始ページ:
- 1194
- 終了ページ:
- 1201
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- 言語:
- 英語
- 請求記号:
- P63600/5040
- 資料種別:
- 国際会議録
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