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Status 157-nm lithography development at IMEC

著者名:
Ronse, K.G. ( IMEC (Belgium) )
Bisschop, P.D. ( IMEC (Belgium) )
Eliat, A. ( IMEC (Belgium) )
Goethals, A.M. ( IMEC (Belgium) )
Hermans, J. ( IMEC (Belgium) )
Jonckheere, R. ( IMEC (Belgium) )
Heuvel, D.V.D. ( IMEC (Belgium) )
Roey, F.V. ( IMEC (Belgium) )
Beckx, S. ( IMEC (Belgium) )
Wouters, J.M. ( IMEC (Belgium) )
Marneffe, J.F. ( IMEC (Belgium) )
O'Neil, T. ( ASML (USA) )
Tirri, B. ( ASML (USA) )
Sewell, H. ( ASML (USA) )
さらに 9 件
掲載資料名:
Optical Microlithography XVI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5040
発行年:
2003
巻:
Part One
開始ページ:
640
終了ページ:
649
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
言語:
英語
請求記号:
P63600/5040
資料種別:
国際会議録

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