Pecision control of poly-gate CD by local OPC for elimination of microloading effect on 0.13-Цm CMOS technology

Pecision control of poly-gate CD by local OPC for elimination of microloading effect on 0.13-Цm CMOS technology

著者名:

Lee, T.-K. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )

掲載資料名:

Optical Microlithography XVI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5040

発行年:

2003

巻:

Part One

開始ページ:

450

終了ページ:

456

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448453 [0819448451]

言語:

英語

請求記号:

P63600/5040

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013029
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Optical microlithography
回次:	2003 : 16th
会議開催地:	Santa Clara, CA, USA
会議開催年:	2003.02.25-2003.02.28

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