ArF solutions for low-k1 back-end imaging
- 著者名:
Wiaux, V. ( IMEC (Belgium) ) Montgomery, P.K. ( Motorola Inc. (USA) ) Vandenberghe, G. ( IMEC (Belgium) ) Monnoyer, P. ( IMEC (Belgium) ) Ronse, K.G. ( IMEC (Belgium) ) Conley, W. ( Motorola, Inc. (USA) ) Litt, L.C. ( Motorola, Inc. (USA) ) Lucas, K. ( Motorola, Inc. (USA) ) Finders, J. ( ASML (Netherlands) ) Socha, R. ( ASML (USA) ) Broeke, D.J.V.D. ( ASML (USA) ) - 掲載資料名:
- Optical Microlithography XVI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5040
- 発行年:
- 2003
- 巻:
- Part One
- 開始ページ:
- 270
- 終了ページ:
- 281
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- 言語:
- 英語
- 請求記号:
- P63600/5040
- 資料種別:
- 国際会議録
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