Blank Cover Image

Fundamental study of photoresist dissolution with real time spectroscopic ellipsometry and interferometry

著者名:
Burns, S.D. ( Univ. of Texas at Austin (USA) )
Schmid, G.M. ( Univ. of Texas at Austin (USA) )
Trinque, B.C. ( Univ. of Texas at Austin (USA) )
Willson, J. ( Univ. of Texas at Austin (USA) )
Wunderlich, J. ( Univ. of Texas at Austin (USA) )
Tsiartas, P.C. ( Univ. of Texas at Austin (USA) )
Taylor, J.C. ( Univ. of Texas at Austin (USA) )
Burns, R.L. ( Univ. of Texas at Austin (USA) )
Wilson, C.G. ( Univ. of Texas at Austin (USA) )
さらに 4 件
掲載資料名:
Advances in Resist Technology and Processing XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039
発行年:
2003
巻:
2
パート:
Poster Session
開始ページ:
1063
終了ページ:
1075
総ページ数:
13
出版情報:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
言語:
英語
請求記号:
P63600/5039
資料種別:
国際会議録

類似資料:

Schmid, G.M., Burns, S.D., Stewart, M.D., Willson, C.G.

SPIE-The International Society for Optical Engineering

Stewart, M.D., Becker, D.J., Stachowiak, T.B., Schmid, G.M., Michaelson, T.B., Tran, H.V., Willson, C.G.

SPIE-The International Society for Optical Engineering

Burns,S.D., Gardiner,A.B., Krukonis,V.J., Wetmore,P.M., Lutkenhaus,J., Schmid,G.M., Flanagin,L.W., Willson,C.G.

SPIE-The International Society for Optical Engineering

Brodsky,C.J., Trinque,B.C., Johnson,H.F., Willson,C.G.

SPIE-The International Society for Optical Engineering

Taylor, J.C., Chambers, C.R., Deschner, R., LeSuer, R.J., Conley, W.E., Burns, S.D., Willson, C.G.

SPIE - The International Society of Optical Engineering

Conley, W., Trinque, B.C., Miller, D.A., Zimmerman, P., Kudo, T., Dammel, R.R., Romano, A.R., Willson, C.G.

SPIE-The International Society for Optical Engineering

P.C. Tsiartas, L.L. Simpson, A. Qin, C.G. Willson, R.D. Allen

Society of Photo-optical Instrumentation Engineers

Flanagin,L.W., McAdams,C.L., Tsiartas,P.C., Henderson,C.L., Hinsberg,W.D., Willson,C.G.

SPIE-The International Society for Optical Engineering

Lin, E.K., Soles, C.L., Goldfarb, D.L., Trinque, B.C., Burns, S.D., Jones, R.L., Lenhart, J.L., Angelopoulos, M., …

SPIE-The International Society for Optical Engineering

Henderson,C.L., Tsiartas,P.C., Flanagin,L.W., Pancholi,S., Chowdhury,S.A., Dombrowski,K.D., Chinwalla,A.N., Willson,C.G.

SPIE-The International Society for Optical Engineering

Conley, W., Trinque, B.C., Miller, D., Caporale, S., Osborn, B.P., Kumamoto, S., Pinnow, M.J., Callahan, R., Chambers, …

SPIE-The International Society for Optical Engineering

Henderson,C.L., Tsiartas,P.C., Pancholi,S., Chowdhury,S.A., Dombrowski,K.D., Willson,C.G., Dammel,R.R.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12