Subfield scheduling for throughput maximization in electron-beam photomask fabrication
- 著者名:
- Babin, S.V. ( Soft Services (USA) )
- Kahng, A.B. ( Univ. of California/San Diego (USA) )
- Mandoiu, I.I. ( Univ. of California/San Diego (USA) )
- Muddu, S. ( Univ. of California/San Diego (USA) )
- 掲載資料名:
- Emerging Lithographic Technologies VII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5037
- 発行年:
- 2003
- 巻:
- 2
- パート:
- Poster Session
- 開始ページ:
- 934
- 終了ページ:
- 942
- 総ページ数:
- 9
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448422 [0819448427]
- 言語:
- 英語
- 請求記号:
- P63600/5037
- 資料種別:
- 国際会議録
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3
国際会議録
Photomask fabrication of focusing diffractive optical elements using electron-beam lithography
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SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |