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Reactive polymers: a route to nanoimprint lithography at low temperatures

著者名:
Pfeiffer, K. ( micro resist technology GmbH (Germany) )
Reuther, F. ( micro resist technology GmbH (Germany) )
Carlberg, P. ( Lund Univ. (Sweden) )
Fink, M. ( micro resist technology GmbH (Germany) )
Gruetzner, G. ( micro resist technology GmbH (Germany) )
Montelius, L. ( Lund Univ. (Sweden) )
さらに 1 件
掲載資料名:
Emerging Lithographic Technologies VII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5037
発行年:
2003
巻:
1
パート:
Session 6
開始ページ:
203
終了ページ:
210
総ページ数:
8
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448422 [0819448427]
言語:
英語
請求記号:
P63600/5037
資料種別:
国際会議録

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