Estimating cross-section semiconductor structure by comparing top-down SEM images
- 著者名:
- Price, J.R. ( Oak Ridge National Lab. (USA) )
- Bingham, P.R. ( Oak Ridge National Lab. (USA) )
- Tobin, K.W. Jr., ( Oak Ridge National Lab. (USA) )
- Karnowski, T.P. ( Oak Ridge National Lab. (USA) )
- 掲載資料名:
- Machine vision applications in industrial inspection XI :proceedings of electronic imaging science and technology 2003 : 22-24 January 2003, Santa Clara, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5011
- 発行年:
- 2003
- 開始ページ:
- 161
- 終了ページ:
- 170
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448118 [0819448117]
- 言語:
- 英語
- 請求記号:
- P63600/5011
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
国際会議録
Spatial heterodyne interferometry techniques and applications in semiconductor water manufacturing
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |