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State of the art of fine patterned Si TFT (Invited Paper)

著者名:
Noguchi, T. ( Sungkyunkwan Univ. (South Korea) )  
掲載資料名:
Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5004
発行年:
2003
開始ページ:
144
終了ページ:
149
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448040 [0819448044]
言語:
英語
請求記号:
P63600/5004
資料種別:
国際会議録

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