Zone-plate-array lithography (ZPL): a maskless fast-turn-around system for microoptic device fabrication (Invited Paper)
- 著者名:
- Menon, R. ( Massachusetts Institute of Technology (USA) )
- Gil, D. ( Massachusetts Institute of Technology (USA) )
- Carter, D.J.D. ( Charles Stark Draper Labs., Inc. (USA) )
- Patel, A. ( Massachusetts Institute of Technology (USA) )
- Smith, H.I. ( Massachusetts Institute of Technology (USA) )
- 掲載資料名:
- Micromachining Technology for Micro-Optics and Nano-Optics
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4984
- 発行年:
- 2003
- 開始ページ:
- 10
- 終了ページ:
- 17
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447845 [0819447846]
- 言語:
- 英語
- 請求記号:
- P63600/4984
- 資料種別:
- 国際会議録
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4
国際会議録
Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
MRS-Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |