High-power optical microswitch fabricated by deep reactive ion etching (DRIE)
- 著者名:
- Cochran, K.R. ( Univ. of Maryland/College Park (USA) )
- Fan, L. ( Naval Surface Warfare Ctr. (USA) )
- DeVoe, D.L. ( Univ. of Maryland/College Park (USA) )
- 掲載資料名:
- MOEMS and Miniaturized Systems III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4983
- 発行年:
- 2003
- 開始ページ:
- 75
- 終了ページ:
- 86
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447838 [0819447838]
- 言語:
- 英語
- 請求記号:
- P63600/4983
- 資料種別:
- 国際会議録
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Characterization and Modeling of Wafer and Die Level Uniformity in Deep Reactive Ion Etching (DRIE)
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High-resolution polymer LEDs fabricated by drop-on-demand inkjet printing and reactive ion etching
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