Surface microfabrication of silica glass by excimer laser irradiation of toluene solution
- 著者名:
Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Yasui, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Ding, X. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Sato, T. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Yabe, A. ( National Institute of Advanced Industrial Science and Technology (Japan) ) - 掲載資料名:
- Photon Processing in Microelectronics and Photonics II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4977
- 発行年:
- 2003
- 開始ページ:
- 269
- 終了ページ:
- 280
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447777 [0819447773]
- 言語:
- 英語
- 請求記号:
- P63600/4977
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
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11
国際会議録
Fabrication of 1-μm patterns on fused silica plates by laser-induced backside wet etching (LIBWE)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |