Blank Cover Image

Laser micromachining in the microelectronics industry: emerging applications (Invited Paper)

著者名:
Subrahmanyan, P.K. ( Electro Scientific Industries, Inc. (USA) )  
掲載資料名:
Photon Processing in Microelectronics and Photonics II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4977
発行年:
2003
開始ページ:
188
終了ページ:
197
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
言語:
英語
請求記号:
P63600/4977
資料種別:
国際会議録

類似資料:

1 国際会議録 Laser metallization for microelectronics and bio-applications (Invited Paper)

Laude, L.D., Kolev, K., Dicara, C., Dupas-Bruzek, C.

SPIE-The International Society for Optical Engineering
7 国際会議録 Tunneling injection quantum dot lasers (Invited Paper)

Chuang, S.L., Kondratko, P.K., Kim, J., Walter, G., Holonyak, N., Heller, R., Zhang, X., Dupuis, R.

SPIE - The International Society of Optical Engineering
2 国際会議録 Beam shaping applications in laser micromachining for the microelectronics industry

Dunsky,C.M.

SPIE-The International Society for Optical Engineering
8 国際会議録 New techniques for laser micromachining MEMS devices (Invited Paper)

Abbott, C., Allott, R.M., Bann, B., Boehlen, K.L., Gower, M.C., Rumsby, P.T., Stassen Boehlen, I., Sykes, N.

SPIE-The International Society for Optical Engineering
3 国際会議録 Laser micromachining in the microelectronics industry

Sun, Y., Swenson, E.J.

SPIE-The International Society for Optical Engineering
9 国際会議録 Laser micromachining of chemically altered polymers (Invited Paper)

Lippert,T.K.

SPIE-The International Society for Optical Engineering
4 国際会議録 Overview and future prospects of the use of lasers for packaging by the microelectronics and photonics industry in Japan (Invited Paper)

Washio, K., Kouta, H.

SPIE-The International Society for Optical Engineering
10 国際会議録 Femtosecond laser micromachining: applications in photonic device fabrication and laser joining (Invited Paper) [6400-03]

Watanabe, W., Nishii, J., Itoh, K.

SPIE - The International Society of Optical Engineering
5 国際会議録 Optical applications of silicon micromachining technology (Invited Paper)

Trott,C.R., Yang,L., Carey,K., Ratowsky,R.P., Kallman,J.S.

SPIE-The International Society for Optical Engineering
11 国際会議録 Laser micromachining of biofactory-on-a-chip devices (Invited Paper)

Burt, J.P.H., Goater, A.D., Hayden, C.J., Tame, J.A.

SPIE-The International Society for Optical Engineering
6 国際会議録 Laser micromachining in the microelectronics industry: a historical overview

Swenson,E.J., Sun,Y., Dunsky,C.M.

SPIE-The International Society for Optical Engineering
12 国際会議録 High-speed quantum well and quantum dot lasers (Invited Paper)

Bhattacharya,P.K., Zhang,X., Kamath,K., Klotzkin,D.l, Phillips,J., Caneau,C., Bhat,R.J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12