Ultrashort-pulse laser micromachining testbed development

Ultrashort-pulse laser micromachining testbed development

著者名:

Thomas, J.G. ( The Pennsylvania State Univ. (USA) )
Schriempf, J.T. ( The Pennsylvania State Univ. (USA) )
Gilmore, R. ( Extrude Hone Corp. (USA) )

掲載資料名:

Photon Processing in Microelectronics and Photonics II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4977

発行年:

2003

開始ページ:

108

終了ページ:

117

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447777 [0819447773]

言語:

英語

請求記号:

P63600/4977

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012961
シリーズID:	PA00000029
会議名:	SPIE LASE : Photon processing in microelectronics and photonics
回次:	2003 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	2003.01.27-2003.01.30

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