Modification of sidewall roughness in silica deep etching and its influence on coupling loss in hybrid integration

Modification of sidewall roughness in silica deep etching and its influence on coupling loss in hybrid integration

著者名:

Choi, D.Y. ( Samsung Electronics Co., Ltd. (South Korea) )
Lee, J.H. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, D.S. ( Samsung Electronics Co., Ltd. (South Korea) )
Jung, S.T. ( Samsung Electronics Co., Ltd. (South Korea) )

掲載資料名:

Integrated Optical Devices: Fabrication and Testing

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4944

発行年:

2003

開始ページ:

337

終了ページ:

345

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447395 [0819447390]

言語:

英語

請求記号:

P63600/4944

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012928
シリーズID:	PA00000029
会議名:	Photonics Fabrication Europe : Integrated optical devices
回次:	2002
会議開催地:	Brugge, Belgium
会議開催年:	2002.10.30-2002.11.01

類似資料:

1 国際会議録 Modification of Natural Zeolite Powder and Its Application to Interior Non-Woven Textile for Indoor Air Quality Control Lim, H.M., Jung, J.S., Kim, D.S., Lee, D.J., Lee, S.H., Kim, W.N. Trans Tech Publications	7 国際会議録 Insertion loss reduction in high-speed polymer electro-optic modulators using tapered waveguide, fiber tip lenses, and modification of waveguide structures Zang, D.Y., Shu, G., Downing, T., Lin, W., Oh, C., Bechtel, J.H. SPIE-The International Society for Optical Engineering
2 国際会議録 Preparation of TiO2/SiO2 Hybrid Hardcoatings on Stainless Steel and its Photocatalytic Effect J.S. Park, D.S. Kim, H.M. Lim, D.H. Kim, J.H. Jeong, S.H. Lee Trans Tech Publications	8 国際会議録 Influence of resin properties to resist performance at ArF lithography Yoon, S., Kim, M., Lee, H., Kim, D.Y., Kim, Y.H., Kim, B.D., Kim, J.H., Kim, K.-M., Lee, S.Y., Chon, S.-M. SPIE - The International Society of Optical Engineering
3 国際会議録 Optical and thermomechanical properties of plasma-enhanced CVD silicon dioxide films upon annealing Choi, D.Y., You, K.H., Guessel, S., Jung, S.T. SPIE - The International Society of Optical Engineering	9 国際会議録 Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching Lee,J.-Y., Kim,S.-H., Lim,H.-T., Kim,C.-H., Kim,Y.-K. SPIE-The International Society for Optical Engineering
4 国際会議録 Soft computing and soft communication (SC2) hybrid rf wireless communication platforms and interfaces for BLOS and sensor WLAN applications Jannson,T.P., Kostrzewski,A.A., Kang,D.S., Son,B., Lee,C., Kim,J.H., Kolesnikov,K. SPIE-The International Society for Optical Engineering	10 国際会議録 Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope Jang,W.I., Choi,C.A., Hong,Y.S., Jun,C.H., Kim,Y.T., Lee,J.H. SPIE - The International Society for Optical Engineering
5 国際会議録 The Phase Transition of Bi-Pt Alloys at the Interface of Pt/SrBi2Ta2O9 and Its Effect on Interface Roughness Shin, D. S., Lee, H. N., Kim, Y. T., Park, Y. K., Choi, I-H. MRS - Materials Research Society	11 国際会議録 Silicon surface micromachining by anhydrous HF gas-phase etching with methanol Jang,W.I., Choi,C.A., Lee,C.S., Hong,Y.S., Lee,J.H., Baek,J.T., Kim,B.W. SPIE-The International Society for Optical Engineering
6 国際会議録 Under-Gate Triode Type Field Emission Displays With Carbon Nanotube Emitters Kang, J.H., Choi, Y.S., Lee, N.S., Park, J., Choi, J.H., Choi, W.B., Kim, H.Y., Lee, Y.J., Chung, D.S., Jin, Y.W., You, … Materials Research Society	12 国際会議録 Wide applications of design based metrology with tool integration H. Yang, J. Kim, A. Jung, T. Lee, D. Yim Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12