SiON technology for integrated optical sensors (Invited Paper)
- 著者名:
- Lambeck, P.V. ( Univ. Twente (Netherlands) )
- Worhoff, K. ( Univ. Twente (Netherlands) )
- 掲載資料名:
- Integrated Optical Devices: Fabrication and Testing
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4944
- 発行年:
- 2003
- 開始ページ:
- 195
- 終了ページ:
- 204
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447395 [0819447390]
- 言語:
- 英語
- 請求記号:
- P63600/4944
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |