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Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers

著者名:
Tsaur, J.-J. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Wang, Z.J. ( Tohoku Univ. (Japan) )
Zhang, L. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Ichiki, M. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Suga, T. ( Tokyo Univ. (Japan) )
さらに 1 件
掲載資料名:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4936
発行年:
2002
開始ページ:
215
終了ページ:
224
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
言語:
英語
請求記号:
P63600/4936
資料種別:
国際会議録

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