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Modification of photoresist profile in lift-off process for MEMS application

著者名:
  • Nagarajan, R. ( Institute of Microelectronics (Singapore) )
  • Kumar, R. ( Institute of Microelectronics (Singapore) )
掲載資料名:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4936
発行年:
2002
開始ページ:
159
終了ページ:
167
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
言語:
英語
請求記号:
P63600/4936
資料種別:
国際会議録

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