Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission
- 著者名:
Liu, G. ( Swinburne Univ. of Technology (Australia) ) Harvey, E.C. ( Swinburne Univ. of Technology (Australia) ) Toncich, D.J. ( Swinburne Univ. of Technology (Australia) ) Hayes, J.P. ( Swinburne Univ. of Technology (Australia) ) Ng, C.K. ( Swinburne Univ. of Technology (Australia) ) Jin, H. ( Swinburne Univ. of Technology (Australia) ) Solomon, M. ( Swinburne Univ. of Technology (Australia) ) - 掲載資料名:
- Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4936
- 発行年:
- 2002
- 開始ページ:
- 146
- 終了ページ:
- 153
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447319 [0819447315]
- 言語:
- 英語
- 請求記号:
- P63600/4936
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering |
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5
国際会議録
Excimer laser ablation used for the fabrication of micro-optic phase and diffraction elements
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |