Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)

Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)

著者名:

Woollam, J.A. ( J.A. Woollam Co., Inc. (USA) )
Bungay, C.L. ( J.A. Woollam Co., Inc. (USA) )
Yan, L. ( Univ. of Nebraska, Lincoln (USA) )
Thompson, D.W.
Hilfiker, J.N. ( J.A. Woollam Co., Inc. (USA) )

掲載資料名:

Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4932

発行年:

2003

開始ページ:

393

終了ページ:

404

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447272 [0819447277]

言語:

英語

請求記号:

P63600/4932

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012919
シリーズID:	PA00000029
会議名:	Laser Damege : International Workshop on Laser Beam and Optics Characterization ; Annual Boulder Damage Symposium
回次:	2002 : 7th ; 34th
会議開催地:	Boulder, CO, USA
会議開催年:	2002.09.18-2002.09.19 ; 2002.09.16-2002.09.18

類似資料:

1 国際会議録 Spectroscopic Ellipsometry in Optical Coatings Manufacturing J.N. Hilfiker, J.S. Hale, B.D. Johs, T.E. Tiwald, R.A. Synowicki, C.L. Bungay, J.A. Woollam Society of Vacuum Coaters	7 国際会議録 In-Situ and Ex-Situ Characterization of Magneto-Optic Materials Deposited Electrochemically Hilfiker, J.N., Woollam, J.A. Electrochemical Society
2 国際会議録 Optical characterization in the vacuum ultraviolet with variable angle spectroscopic ellipsometry:157 nm and below Hilfiker,J.N., Singh,B., Synowicki,R.A., Bungay,C.L. SPIE - The International Society for Optical Engineering	8 国際会議録 Spectroscopic ellipsometry applications in photomask technology R. A. Synowicki, J. N. Hilfiker Society of Photo-optical Instrumentation Engineers
3 国際会議録 Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam Society of Vacuum Coaters	9 国際会議録 Spectroscopic Ellipsometry Methods for Thin Absorbing Coatings J.N. Hilfiker, R.A. Synowicki, H.G. Tompkins Society of Vacuum Coaters
4 国際会議録 Variable angle spectroscopic ellipsomefry in the vacuum ultraviolet Woollam,J.A., Hilfiker,J.N., Tiwald,T.E., Bungay,C.L., Synowicki,R.A., Meyer,D.E., Herzinger,C.M., Pfeiffer,G.L., … SPIE-The International Society for Optical Engineering	10 国際会議録 Thin Film Measurements by Spectroscopic Ellipsometry Over an Extended Range Cox, J.N., Hutchinson, J.M., Lee, K.K.D., Sheridan, B., Wong, R., Yang, I.-C.J. Electrochemical Society
5 国際会議録 In-situ monitor and control using fast spectroscopic ellipsometry Woollam,J.A., Gao,X., Heckens,S., Hilfiker,J.N. SPIE-The International Society for Optical Engineering	11 国際会議録 Recent developments in spectroscopic ellipsometry for in-situ applications Johs,B.D., Hale,J., Ianno,N.J., Herzinger,C.M., Tiwald,T.E., Woollam,J.A. SPIE-The International Society for Optical Engineering
6 国際会議録 Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry Synowicki,R.A., Hilfiker,J.N., Dammel,R.R., Henderson,C.L. SPIE-The International Society for Optical Engineering	12 国際会議録 SUPERLATTICE OPTICAL PROPERTIES MEASURED BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY Snyder, P. G., Merkel, K. G., De, B. N., Woollam, J. A., Langer, D. W., Stutz, C. E., Jones, R., Rai, A. K., Evans, K. Materials Research Society

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