Defects and their electronic properties in high-pressure-annealed SOI structures sliced by hydrogen
- 著者名:
- 掲載資料名:
- Progress in SOI structures and devices operating at extreme conditions
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 58
- 発行年:
- 2002
- 開始ページ:
- 269
- 終了ページ:
- 288
- 総ページ数:
- 20
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402005756 [140200575X]
- 言語:
- 英語
- 請求記号:
- N17050/58
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Kluwer Academic Publishers |
Kluwer Academic Publishers |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Kluwer Academic Publishers |
11
国際会議録
Visible photoluminescence from Ge+-ion-implanted SiSxNy annealed under hydrostatic pressure
SPIE-The International Society for Optical Engineering |
Kluwer Academic Publishers |
Kluwer Academic Publishers |