SOL-GEL DEPOSITION PROCESSES OF THIN CERAMIC FILMS
- 著者名:
- 掲載資料名:
- Chemical physics of thin film deposition processes for micro- and nano-technologies
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 55
- 発行年:
- 2002
- 開始ページ:
- 69
- 終了ページ:
- 90
- 総ページ数:
- 22
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402005244 [1402005245]
- 言語:
- 英語
- 請求記号:
- N17050/55
- 資料種別:
- 国際会議録
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11
国際会議録
Sol-Gel Process Derived Superhydrophobic Silica Thin Films for Antistiction of MEMS Devices
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