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Reliability Issues of Ultra Thin Silicon Nitride (a-SiN:H) by Hot Wire CVD for Deep Sub-Micron CMOS Technologies

著者名:
掲載資料名:
Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001)
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4746
発行年:
2002
巻:
VOL-2
開始ページ:
1418
終了ページ:
1420
総ページ数:
3
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445001 [0819445002]
言語:
英語
請求記号:
P63600/4746
資料種別:
国際会議録

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