Toward MEMS-based infrared tunable microspectrometers

Toward MEMS-based infrared tunable microspectrometers

著者名:

Antoszewski, J. ( Univ. of Western Australia (Australia) )

掲載資料名:

Smart structures, devices, and systems : 16-18 December 2002 Melbourne, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4935

発行年:

2002

開始ページ:

148

終了ページ:

155

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447302 [0819447307]

言語:

英語

請求記号:

P63600/4935

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012783
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Smart Structures, Devices, and Systems
回次:	2002
会議開催地:	Melbourne, Australia
会議開催年:	2002.12.16-2002.12.18

類似資料:

1 国際会議録 Fabry-Perot MEMS microspectrometers spanning the SWIR and MWIR A. J. Keating, J. Antoszewski, K. K. M. B. D. Silva, K. J. Winchester, T. Nguyen, J. M. Dell, C. A. Musca, L. Faraone, … SPIE - The International Society of Optical Engineering	7 国際会議録 Refractive index engineering for a distributed Bragg reflector for a resonant-cavity-enhanced detector Wehner, J.G.A., Sewell, R., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L. SPIE - The International Society of Optical Engineering
2 国際会議録 MEMS based tunable infrared sensors (Invited Paper) Antoszewski, J., Winchester, K. J., Keating, A. J., Nguyen, T., Silva, K. K. M. B. D., Huang, H., Musca, C. A., Dell, J. … SPIE - The International Society of Optical Engineering	8 国際会議録 Isothermal vapor phase epitaxy as a versatile technology for infrared photodetectors Adamiec,K., Grudzien,M., Nowak,Z., Pawluczyk,J., Piotrowski,J., Antoszewski,J., Dell,J.M., Musca,C.A., Faraone,L. SPIE-The International Society for Optical Engineering
3 国際会議録 Tunable Fabry-Perot filters operating in the 3 to 5 pm range for infrared micro-spectrometer applications [6186-08] Antoszewski J., Keating A., Winchester K., Nguyen T., Silva D., Musca C., Dell J., Samardzic O., Faraone L. SPIE - The International Society of Optical Engineering	9 国際会議録 SWIR hyperspectral detection with integrated HgCdTe detector and tunable MEMS filter (Invited Paper) [6295-17] Mitra P., Beck J. D., Skokan M. R., Robinson J. E., Antoszewski J., Winchester K. J., Keating A. J., Nguyen T., Silva K. … SPIE - The International Society of Optical Engineering
4 国際会議録 Determination of residual stress in low-temperature PECVD silicon nitride thin films Martyniuk, M.P., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L. SPIE - The International Society of Optical Engineering	10 国際会議録 A monolithically integrated HgCdTe SWIR photodetector and tunable MEMS-based optical filter Antoszewski, J., Winchester, K. J., Keating, A. J., Nguyen, T., Silva, K. K. M. B. D., Huang, H., Musca, C. A., Deli, J. … SPIE - The International Society of Optical Engineering
5 国際会議録 HgCdTe long-wavelength infrared photovoltaic detectors formed by reactive ion etching Nguyen, T.T., Dell, J.M., Musca, C.A., Antoszewski, J., Faraone, L. SPIE-The International Society for Optical Engineering	11 国際会議録 Mobility spectrum techniques for characterizing multilayer semiconductors structures Musca, C.A., Nguyen, T., Antoszewski, J., Redfern, D.A., Dell, J.M., Faraone, L. SPIE-The International Society for Optical Engineering
6 国際会議録 Carrier transport characterization of high-density plasma-induced p-to-n type converted MWIR HgCdTe material [6206-83] Park B. A., Musca C. A., Antoszewski J., Nguyen T., Winchester K. J., Dell J. M., Faraone L. SPIE - The International Society of Optical Engineering	12 国際会議録 Thermal Stability in HgCdTe IR Photodiodes Dell, J.M., Nguyen, T., Musca, C.A., Antoszewski, J., Faraone, L., Pal, R. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12