Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

著者名:

Zhang, L. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Ichiki, M.
Wang, Z.-J. ( Tohoku Univ. (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )

掲載資料名:

Smart materials II : 16-18 December 2002, Melbourne, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4934

発行年:

2002

開始ページ:

30

終了ページ:

37

総ページ数:

8

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447296 [0819447293]

言語:

英語

請求記号:

P63600/4934

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012781
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Smart Materials
回次:	2002 : 2nd
会議開催地:	Melbourne, Australia
会議開催年:	2002.12.16-2002.12.18

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