Advanced Thick System for AIN Substrates
- 著者名:
Wang, Y.L. ( DuPont Microcircuit Materials ) Carroll, A.F. Smith, J.D. Cho, Y. Bacher, R.J. Anderson, D.K. Crumpton, J.C. Needs, C.R.S. - 掲載資料名:
- Proceedings : 2002 International Symposium on Microelectronics : September 4-6, 2002, Colorado Convention Center, Denver, CO
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4931
- 発行年:
- 2002
- 開始ページ:
- 566
- 終了ページ:
- 570
- 総ページ数:
- 5
- 出版情報:
- Washington, DC: IMAPS
- ISSN:
- 0277786X
- ISBN:
- 9780930815660 [0930815661]
- 言語:
- 英語
- 請求記号:
- P63600/4931
- 資料種別:
- 国際会議録
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