Microstructures of PMMA sheet fabricated by RIE

Microstructures of PMMA sheet fabricated by RIE

著者名:

Huang, L.W. ( Shanghai Jiaotong Univ. (China) )
Yang, C.S.
Ding, G.F.

掲載資料名:

MEMS/MOEMS Technologies and Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4928

発行年:

2002

開始ページ:

209

終了ページ:

214

総ページ数:

6

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447173 [081944717X]

言語:

英語

請求記号:

P63600/4928

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012777
シリーズID:	PA00000029
会議名:	Photonics Asia : MEMS/MOEMS technologies and applications
回次:	2002
会議開催地:	Shanghai, China
会議開催年:	2002.10.17-2002.10.18

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