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Microstructures of PMMA sheet fabricated by RIE

著者名:
掲載資料名:
MEMS/MOEMS Technologies and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4928
発行年:
2002
開始ページ:
209
終了ページ:
214
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
言語:
英語
請求記号:
P63600/4928
資料種別:
国際会議録

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