Pd/Ni bilayer electrochemical microactuator
- 著者名:
- Yao, J.Y. ( Shanghai Jiaotong Univ. (China) )
- Ding, G.F.
- Cao, Y.
- Yang, C.S.
- Shen, T.H.
- 掲載資料名:
- MEMS/MOEMS Technologies and Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4928
- 発行年:
- 2002
- 開始ページ:
- 204
- 終了ページ:
- 208
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447173 [081944717X]
- 言語:
- 英語
- 請求記号:
- P63600/4928
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results
SPIE-The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
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SPIE-The International Society for Optical Engineering |
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Trans Tech Publications |