Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates
- 著者名:
- Li, J.L. ( Univ. of Strathclyde (UK) )
- Brown, J.G.
- Uttamchandani, D.
- 掲載資料名:
- MEMS/MOEMS Technologies and Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4928
- 発行年:
- 2002
- 開始ページ:
- 180
- 終了ページ:
- 189
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447173 [081944717X]
- 言語:
- 英語
- 請求記号:
- P63600/4928
- 資料種別:
- 国際会議録
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